MFC-MCE100
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Overview
Mass Flow Controller with SEMI-standard footprint, 0-100 SCCM, Display, MKS style DB15 connector, 0-5 volt output of mass flow, 0-5 volt setpoint input control (selectable serial and local control), RS-232 and display output absolute pressure, mass flow, volumetric flow, temperature and gas select. Primary gas selection set to N2 with 98 selectable gas and gas mix calibrations. With 1/4" welded male VCR fittings. Downstream valve configuration. Does not include power supply.
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