Rebuilding Services

Ion Pump Rebuilding Process

  1. Open Pump & Remove Elements
  2. Disassemble Elements Completely
  3. Clean Stainless Steel Parts
  4. Replace Titanium and Tantalum Parts
  5. Clean and/or Replace Ceramic Parts
  6. Vacuum Degas all Metal Element Parts
  7. Reassemble Elements
  8. Install the Elements in the Clean Body
  9. Leak Check
  10. Bake-Out on Vacuum Manifold
  11. Check for leakage current
  12. Pinch off Seal
  13. Clean Exterior
  14. Check for Leakage Current

Read about our Galaxy® cathode design which provides stable pumping speed for air without sacrificing overall pumping speed.

Please complete our HAZMAT form and forward to info@duniway.com for an RMA# prior to shipment to Duniway Stockroom Corp.

DUNIWAY PART # Description PRICE REQUEST Image
REBG-VIP-020-D Rebuilding Service Varian VIP 20 l/s, Diode-Diode, Positive Polarity
$624.00
REBG-VIP-020-G Rebuilding Service Varian VIP 20 l/s, Starcell-Galaxy, Negative Polarity
$750.00
REBG-VIP-020-N Rebuilding Service Varian VIP 20 l/s, Noble Diode- Noble Diode, Positive Polarity
REBG-VIP-020-S Rebuilding Service Varian VIP 20 l/s, Starcell-Starcell, Negative Polarity
$518.00
DUNIWAY PART # Description PRICE REQUEST Image
REBG-VIP-040-D Rebuilding Service Varian VIP 40 l/s, Diode-Diode, Positive Polarity
$832.00
REBG-VIP-040-G Rebuilding Service Varian VIP 40 l/s, Starcell-Galaxy, Negative Polarity
$900.00
REBG-VIP-040-N Rebuilding Service Varian VIP 40 l/s, Noble Diode- Noble Diode, Positive Polarity
REBG-VIP-040-S Rebuilding Service Varian VIP 40 l/s, Starcell-Starcell, Negative Polarity
$675.00
DUNIWAY PART # Description PRICE REQUEST Image
REBG-VIP-055-D Rebuilding Service Varian VIP 55 l/s, Diode-Diode, Positive Polarity
$832.00
REBG-VIP-055-G Rebuilding Service Varian VIP 55 l/s, Starcell-Galaxy, Negative Polarity
$900.00
REBG-VIP-055-N Rebuilding Service Varian VIP 55 l/s, Noble Diode- Noble Diode, Positive Polarity
REBG-VIP-055-S Rebuilding Service Varian VIP 55 l/s, Starcell-Starcell, Negative Polarity
$675.00
DUNIWAY PART # Description PRICE REQUEST Image
REBG-VIP-075-D Rebuilding Service Varian VIP 75 l/s, Diode-Diode, Positive Polarity
$832.00
REBG-VIP-075-G Rebuilding Service Varian VIP 75 l/s, Starcell-Galaxy, Negative Polarity
$900.00
REBG-VIP-075-N Rebuilding Service Varian VIP 75 l/s, Noble Diode- Noble Diode, Positive Polarity
REBG-VIP-075-S Rebuilding Service Varian VIP 75 l/s, Starcell-Starcell, Negative Polarity
$675.00
DUNIWAY PART # Description PRICE REQUEST Image
REBG-VIP-150-D Rebuilding Service Varian VIP 150 l/s, Diode-Diode, Positive Polarity
$1,016.00
REBG-VIP-150-G Rebuilding Service Varian VIP 150 l/s, Starcell-Galaxy, Negative Polarity
$1,330.00
REBG-VIP-150-N Rebuilding Service Varian VIP 150 l/s, Noble Diode- Noble Diode, Positive Polarity
REBG-VIP-150-S Rebuilding Service Varian VIP 150 l/s, Starcell-Starcell, Negative Polarity
$867.00
DUNIWAY PART # Description PRICE REQUEST Image
REBG-VIP-300-D Rebuilding Service Varian VIP 300 l/s, Diode-Diode, Positive Polarity
$1,525.00
REBG-VIP-300-G Rebuilding Service Varian VIP 300 l/s, Starcell-Galaxy, Negative Polarity
$2,320.00
REBG-VIP-300-N Rebuilding Service Varian VIP 300 l/s, Noble Diode- Noble Diode, Positive Polarity
REBG-VIP-300-S Rebuilding Service Varian VIP 300 l/s, Starcell-Starcell, Negative Polarity
$1,225.00
DUNIWAY PART # Description PRICE REQUEST Image
REBG-VIP-500-D Rebuilding Service Varian VIP 500 l/s, Diode-Diode, Positive Polarity
$2,600.00
REBG-VIP-500-G Rebuilding Service Varian VIP 500 l/s, Starcell-Galaxy, Negative Polarity
$4,100.00
REBG-VIP-500-N Rebuilding Service Varian VIP 500 l/s, Noble Diode- Noble Diode, Positive Polarity
REBG-VIP-500-S Rebuilding Service Varian VIP 500 l/s, Starcell-Starcell, Negative Polarity
$2,000.00

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